Handbook of 3D Integration, Volume 3 Vol. 3

Handbook of 3D Integration, Volume 3 Vol. 3

3D Process Technology

2/5

Edited by key figures in 3D integration and written by top authors from high-tech companies and renowned research institutions, this book covers the intricate details of 3D process technology.

As such, the main focus is on silicon via formation, bonding a.

First published
2014
Publishers
Wiley & Sons· Incorporated· John
Language
English

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